Recently, Professor of Microelectronics of Fudan University Lu Hongliang (corresponding author) leadership team for the first time in conjunction with a hard template method, atomic layer deposition and hydrothermal processes, low-power MEMS devices in situ synthesis of SnO2 nanometer ordered monolayer bowl branch of ZnO nanowires multistage heterogeneous nanocomposite, and as a gas sensor, hydrogen sulfide concentration as low as 1ppm to achieve a high selectivity and ultrasensitive detection. Related outcomes to "Hierarchical highly ordered SnO2 nanobowls branched ZnO nanowires for ultrasensitive and selective hydrogen sulfide gas sensing" was published in the top international journal Microsystems & Nanoengineering (https://doi.org/10.1038/s41378-020-0142-6 ), the journal of the Institute of Electronics, Chinese Academy of cooperation with the original Nature Publishing Group, is the first former engineering journals published by Nature Publishing Group cooperation in the field of microsystems and nano-engineering has had a broad impact.
In recent years, new gas sensors based on metal oxide semiconductor nanomaterials have been greatly concerned, and they have been widely used in gas leak alerts, environmental gas monitoring and industrial gas analysis and other areas. Common product H2S is one of the industrial production of harmful gases dangerous, with great harm to the human body. Trace amounts of H2S is enough to destroy the human respiratory system, causing involuntary neurological sequelae and cardiovascular disease. In view of this, the preparation can effectively monitor ultra-sensitive gas sensors H2S content is important to the surrounding environment, causing a wide range of research interests.
Preparation techniques now common sensor sensing material is nano-coated print drops onto the ceramic tube or MEMS device, which greatly limits the reliability and repeatability of the sensor. Thus, one can be nano-sensing material and seamless integration of MEMS substrate preparation techniques for high-performance gas sensors is crucial to develop low power consumption and high heat stability. In recent years, research and development of synthetic single-situ material macroporous dura plate method can meet the above requirements. Prepared in situ process not only suitable for the manufacture of wafer level, and can effectively reduce the contact resistance, further improve device performance. Further, a single gas sensor sensitive material is often poor selectivity, response / recovery time is long and so on. Construction of multi-level structures help to increase the surface area of the material, while being able to form more homogeneous / heterojunction interface between the matrix and the secondary nanostructure, has been widely considered to be one effective method to enhance Sensing Properties . Consider the synergistic effect between the different materials of different properties, nano-heterostructure multi-stage composite outperforms its homogeneous gas sensing multilevel nanostructures.
MEMS-type single Ordered study design SnO2 ZnO nano bowl branched nanowire devices at an operating temperature of 250 deg.] C, in response to 1ppm of hydrogen sulfide (Ra / Rg) up to 6.24, the rate of change in response (5.24) about SnO2 nano-ordered monolayer bowl 2.6 times the device, while having a fast response / recovery. In addition, the MEMS-type single Ordered gas sensing properties of SnO2 nano ZnO nanowires bowl branched repeated measurement device for a month, it was confirmed with good long-term stability and repeatability. Heterostructure multi-stage not only effectively increases the surface area of the material, to enhance the capacity of the gas adsorbent material, while improving the gas sensing heterojunction responsive material. In addition, our sensing material prepared in situ on a MEMS device having low power consumption and integrated advantages, the development of highly sensitive gas monitoring field, high stability of the gas sensors provide a solid support.
Professor Lu Hongliang led by intelligent micro-nano sensor chips and systems research group is making great efforts to carry out research on intelligent micro-nano sensors of various nano-composite materials and integrated systems, including the application of exploration of gas sensors, photoelectric sensors and microsystems chips. Recently, a number of micro-nano intelligent sensor research results have been published in Nano Energy, ACS Applied Materials & Interfaces, Microsystems & Nanoengineering and Sensors and Actuators B: Chemical and other top journals.
Scheme 1 FIG multistage heterogeneous nanocomposite of SnO2 nano-situ synthesis of an ordered monolayer bowl branched ZnO nanowires on the MEMS device
SEM view of a multistage heterogeneous ordered nanocomposite of SnO2 nano ZnO nanowires branched bowl of FIG. 2 monolayers
TEM view of a multistage heterogeneous nanocomposite ordered monolayer of FIG. 3 SnO2 ZnO nano bowl branched nanowires
FIG 4 MEMS sensor gas H2S yl Performance Test
FIG. 5-yl H2S MEMS sensor gas mechanism, Read, original title: Fudan Forward with new gas-sensing device sensing materials and MEMS Research
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