Study on UV avalanche photodiodes and their arrays for ultraviolet detecting high performance 4H-SiC avalanches

At the 17th China International Semiconductor Lighting Forum (SSLChina2020) Soluki Devices Technology Branch, Dr. Zhou Ye, a senior engineer of Hebei Semiconductor Research Institute, told Dr. Le Le Lee's research progress for UV detection high performance 4H-SiC avalanche photodiodes and its arrays. The avalanche photodiode (APD) has the advantages of high internal gain and high response, and it is possible to effectively detect weak signals and improve the signal-to-noise ratio of the device. Based on SiC's APD UV detector has broad application prospects in the fields of fire warning, environmental testing, UV communications and astronomy research, and its development has also attracted close attention from researchers. However, most of the research work is mainly focused on how to improve the crystal quality of silicon carbide and the process of devices of the device, and lack of systematic research on the structural design level of the entire device. Our technicians have studied the structural parameters of each layer of the APD device, such as thickness, doping concentration, and countertop tilt angle and other architectural factors, optical current, gain coefficient, light response degree, breakdown voltage. The effects of performance parameters of the device and proposes a series of optimization schemes and measures [Nanoscaleres.lett.14,396 (2019), IEEEEEECTRONDEV.LETT.40 (10), 1591 (2019)]. Among them, simulation technology is designed and developed by semiconductor devices, which is designed and saved to save products, and prepare efficient products with lower R & D costs in a shorter R & D cycle. Simulation technology can use finite element simulation analysis, break the experiment to explore bottlenecks, and optimize the structural parameters of the chip structure, provide an efficient and reliable experimental design plan, reproduce the internal working mechanism of the device, reveal the physical mechanism of the chip, to help universities, enterprises and High performance devices are developed during the study, labor and low cost. FQJ, read full text

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